Blank Cover Image

Fluid, Kinitic and Hybrid Simulation Strategies for Modeling Chemically Complex Inductively Coupled Plasmas

Author(s):
Publication title:
Electron Kinetics and applications of glow discharges
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
367
Pub. Year:
1998
Page(from):
349
Page(to):
366
Pages:
18
Pub. info.:
New York: Lenum Press
ISBN:
9780306458224 [0306458225]
Language:
English
Call no.:
N11479/367
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Modeling Inductively Coupled Plasma Tools with Chlorine Chemistry

Bukowski, J.D., Stewart, R. A., Graves, D.B., Vitello, P.

Electrochemical Society
7 Conference Proceedings Inductively-Coupled Plasma Etching of NiFe and NiFeCo

Jung, K. B., Childress, J. R., Pearton, S. J., Jenson, M., Hurst, A. T., Jr., Johnson, D.

MRS - Materials Research Society
2 Conference Proceedings Modeling of Pulsed-Power Inductively Coupled Plasma Reactors

Bukowski, J.D., Stewart, R.A., Graves, D.B., Vitello, P.

Electrochemical Society
8 Conference Proceedings Modeling and Simulation of Two-Dimensional Reactive Plasma Flow in Inductively Coupled Reactors

Lymberopoulos, D., Wise, R., Economou, D.

Electrochemical Society
3 Conference Proceedings Site Balance Models in Plasma Processing: A Comparison to Molecular Dynamics Simulations

Barone, M. E., Graves, D. B.

MRS - Materials Research Society
9 Conference Proceedings Inductively Coupled Plasma Etching of SiC for Power Switching Device Fabrication

Cao,L., Li,B., Zhao,J.H.

Trans Tech Publications
4 Conference Proceedings Computer Simulation of Inductively Coupled Plasmas Using Chlorine Feed Gas

Ho, M-H., Thompson, B.E.

Electrochemical Society
10 Conference Proceedings Fabrication of Group III-Nitride Waveguides by Inductively Coupled Plasma Etching

Li, N., Waki, I., Kumtornkittikul, C., Liang, J.-H., Sugiyama, M., Shimogaki, Y., Nakano, Y.

Electrochemical Society
5 Conference Proceedings Parameters for Feature Evolution Models in Plasma Etching from Molecular Dynamics Simulation

Helmer, B. A., Graves, D. B., Barone, M. E.

MRS - Materials Research Society
11 Conference Proceedings Long-Term Evaluation of a Litmas 'Blue' Inductively-Coupled Plasma Device for Point-of-Use PFC and HFC Abatement

Vartanian, V., Beu, L., Stephens, T., Jewett, R., Tonnis, E., Graves, D.

Electrochemical Society
6 Conference Proceedings Modeling and Simulation of Inductively Coupled High Density Plasma Sources

Economou, D., Lymberopoulos, D.

Electrochemical Society
12 Conference Proceedings Inductively Coupled Plasma Etching of III-Nitrides in Cl2/Xe, Cl2/Ar and Cl2/He

Cho, H., Hahn, Y. B., Hays, D. C., Jung, K. B., Donovan, S. M., Abernathy, C. R., Pearton, S. J., Shul, R. J.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12