Collisioness Heating in Capacitively-Coupled Radio Frequency Discharges
- Author(s):
- Turner M. M.
- Publication title:
- Electron Kinetics and applications of glow discharges
- Title of ser.:
- NATO ASI series. Series B, Physics
- Ser. no.:
- 367
- Pub. Year:
- 1998
- Page(from):
- 313
- Page(to):
- 328
- Pages:
- 16
- Pub. info.:
- New York: Lenum Press
- ISBN:
- 9780306458224 [0306458225]
- Language:
- English
- Call no.:
- N11479/367
- Type:
- Conference Proceedings
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