Reliability of microsystems based on a failure mechanism approach
- Author(s):
Cruzel,S. ( CNES ) Esteve,D. Dilhan,M. Fourniols,J.Y. Pressecq,F. Puig,O. Simonne,J.J. - Publication title:
- MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3880
- Pub. Year:
- 1999
- Page(from):
- 148
- Page(to):
- 155
- Pub. info.:
- Bellingham, Washington: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434777 [0819434779]
- Language:
- English
- Call no.:
- P63600/3880
- Type:
- Conference Proceedings
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