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Process simulation of selective-area MOCVD growth for optoelectronic integrated circuits

Author(s):
Publication title:
Physics and simulation of optoelectronic devices VII : 25-29 January 1999, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3625
Pub. Year:
1999
Page(from):
440
Page(to):
446
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430953 [0819430951]
Language:
English
Call no.:
P63600/3625
Type:
Conference Proceedings

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