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Correlation between gate induced drain leakage and plasma induced interface traps

Author(s):
Ma, Siguang
Zhang, Yaohui
Li, M. F.
Li, Weidan
Wang, J. L. F.
Yen, Andrew C.
Sheng, George T. T.
2 more
Publication title:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
592
Pub. date:
2000
Page(from):
117
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995000 [1558995005]
Language:
English
Call no.:
M23500/592
Type:
Conference Proceedings

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