PbZr0.52Ti0.48O3 ferroelectric thin films on silicon by KrF excimer laser ablation

PbZr0.52Ti0.48O3 ferroelectric thin films on silicon by KrF excimer laser ablation

Author(s):

Publication title:

Materials for smart systems III : symposium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

604

Pub. Year:

2000

Page(from):

239

Pub. info.:

Pittsburgh, PA: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995123 [1558995129]

Language:

English

Call no.:

M23500/604

Type:

Conference Proceedings

Details

TDL ID:	ZA00020836
Series ID:	PA00000011
Conf. info. (Name):	Materials for Smart Systems : Symposium
Conf. info. (Number):	3rd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1999.11.30-1999.12.02

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