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A critical regime for amorphization of ion implanted silicon

Author(s):
Publication title:
Crystallization and related phenomena in amorphous materials : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
321
Pub. date:
1994
Page(from):
417
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992207 [1558992200]
Language:
English
Call no.:
M23500/321
Type:
Conference Proceedings

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