Magnetron dry etching for photonic device fabrication
- Author(s):
Arnot, H. E. G. Zappe, H. P. Epler, J. E. Graf, B. Widmer, R. Lehmann, H. W. - Publication title:
- III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 300
- Pub. Year:
- 1993
- Page(from):
- 177
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991965 [1558991964]
- Language:
- English
- Call no.:
- M23500/300
- Type:
- Conference Proceedings
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