Blank Cover Image

Low temperature SiNx as a sacrificial layer in novel device fabrication

Author(s):
Lothian, J. R.
Ren, F.
Pearton, S. J.
Abernathy, C. R.
Tseng, B.
Hobson, W. S.
1 more
Publication title:
III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
300
Pub. date:
1993
Page(from):
161
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558991965 [1558991964]
Language:
English
Call no.:
M23500/300
Type:
Conference Proceedings

Similar Items:

Lothian, J.R., Ren, F., Pearton, S.J., Chakrabarti, U.K., Abernathy, C.R., Katz, A.

Materials Research Society

Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Mileham, J. R., Shul, R. J., Kilcoyne, S. P., Hagerott-Crawford, M., …

MRS - Materials Research Society

Pearton, S.J., Ren, F., D'asaro, L.A., Hobson, W.S., Fullowan, T.R., Lothian, J., Abernathy, C.R., Kopf, R.F., Kuo, …

Materials Research Society

Hobson, W. S., Pearton, S. J., Abernathy, C. R., von Neida, A. E.

Materials Research Society

Ren, F., Pearton, S.J., Lothian, J.R., Abernathy, C.R., Hobson, W.S.

Materials Research Society

Ren, F., Pearton, S. J., Tseng, B., Lothian, J. R., Constantine, C.

MRS - Materials Research Society

Pearton, S. J., Katz, A., Feingold A, Ren, F., Fullowan, T. R., Lothian, J. R, Abernathy, C. R.

Materials Research Society

10 Conference Proceedings GROWTH AND DOPING OF AlAs BY MOMBE

Abernathy, C. R., Pearton, S. J., Wisk, P. W., Hobson, W. S., Ren, F.

MRS - Materials Research Society

Pearton, S. J., Abernathy, C. R., Ren, F., Lothian, J. R., Kopf, R. P., Katz, A.

MRS - Materials Research Society

Pearton, S. J., Chakrabarti, U. K., Ren, F., Abernathy, C. R., Katz, A., Hobson, W. S., Constantine, C.

MRS - Materials Research Society

Ren, F., Emerson, A. B., Pearton, S. J., Hobson, W. S., Fullowan, T. R., Lothian, J.

Materials Research Society

Hays, D., Abernathy, C.R., Pearton, S.J., Ren, F., Hobson, W.S.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12