Blank Cover Image

Two-Dimensional Dopant Diffusion Study Using Scanning Capacitance Microscopy

Author(s):
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
568
Pub. date:
1999
Page(from):
233
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994751 [1558994750]
Language:
English
Call no.:
M23500/568
Type:
Conference Proceedings

Similar Items:

Griffin, P.B., Plummer, J.D.

Materials Research Society

Perozziello, E.A., Griffin, P.B., Plummer, J.D.

Electrochemical Society

Ural, A., Griffin, P. B., Plummer, J. D.

MRS - Materials Research Society

Chao, H. S., Griffin, P. B., Plummer, J. D.

MRS - Materials Research Society

Duhayon, N., Clarysse, T., Alvarez, D., Eyben, P., Fouchier, M., Vandervorst, W.J., Hellemans, L.

Electrochemical Society

Griffin, P.B., Plummer, J.D.

Electrochemical Society

Crowder, S.W., Griffin, P.B., Plummer, J.D.

Electrochemical Society

Crowder, S. W., Griffin, P. B., Plummer, J. D.

Electrochemical Society

Duhayon, N., Clarysse, T., Alvarez, D., Eyben, P., Fouchier, M., Vandervorst, W., Hellemans, L.

SPIE-The International Society for Optical Engineering

Takamura, Yayoi, Jain, Sameer, Griffin, Peter B., Plummer, James D.

Materials Research Society

Griffin, P. B., Plummer, J. D.

Electrochemical Society

Rousscau, P.M., Griffin, P.B., Carcy, P.G., Plummer, J.D.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12