Blank Cover Image

Transient Enhanced Diffusion and Dose Loss of Indium in Silicon

Author(s):
Dokumaci, O.
Ronsheim, P.
D'emic, C.
Domenicucci, A. G.
Hegde, S.
Kozlowski, P.
Wong, H-S. P.
2 more
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
568
Pub. Year:
1999
Page(from):
205
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994751 [1558994750]
Language:
English
Call no.:
M23500/568
Type:
Conference Proceedings

Similar Items:

Dokumaci, O., Ronsheim, P., Hegde, S., Cobral, C., Jr.

Electrochemical Society

Gusev, E.P., D'Emic, C.P., Zabel, T.H., Copel, M.

Electrochemical Society

Adam, L. S., Law, M. E., Dokumaci, O., Haddara, Y., Murthy, C., Park, H., Hegde, S., Chidambarrao, D., Mollis, S., …

MRS - Materials Research Society

Gusev, E.P., Canter, E., Copel, M., Gribelyuk, M., Buchanan, D.A., Okorn-Schmidt, H., D'Emic, C., Kozlowski, P., …

Electrochemical Society

Dokumaci, O., Ronsheim, P., Mocuta, A., Mocuta, D., Kozlowski, P., Chidambarrao, D., Saunders, P., Chen, H. (IBM)

Electrochemical Society

D'Emic, C.P., Gusev, E.P., Copel, M., Newbury, I., Unvel, H., Kozlowski, P., Bruley, J., Murphy, R.

Electrochemical Society

Dokumaci, Omer, Ronsheim, Paul, Hegde, Suri, Chidambarrao, Dureseti, Shaik-Adam, Lahir, Law, Mark E.

Materials Research Society

Dokumaci, Omer, Kaplam, Richard, Khare, Mukesh, Ronsheim, Paul, Burnham, Jay, Domenicucci, Anthony, Li, Jinghong, …

Materials Research Society

Gambino, J. P., Parks, C. C., Hegde, S., Domenicucci, A. G.

MRS - Materials Research Society

Stolk, P. A., Gossmann, H.-J., Eaglesham, D. J., Jacobson, D. C., Luftman, H. S., Poate, J. M.

MRS - Materials Research Society

D'Emic, C.P., Gusev, E.P., Newbury, I., Kozlowski, P., Chan, K., Zabel, T., Varekamp, P.

Electrochemical Society

Adam, Lahir Shaik, Robertson, Lance, Law, Mark E., Jones, Kevin, Gable, Kevin, Hegde, Suri, Dokumaci, Omer

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12