Blank Cover Image

Arsenic Trapping and its Effect on Enhanced Diffusion

Author(s):
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
568
Pub. Year:
1999
Page(from):
169
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994751 [1558994750]
Language:
English
Call no.:
M23500/568
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Reaction of Excess Silicon Interstitials in the Presence of Arsenic and Germanium

Brindos, R., Keys, P.H., Griglione, M., Jones, K. S., Law, M. E., Agarwal, Aditya, Andideh, Ebrahim

Materials Research Society
7 Conference Proceedings The Role of Vacancies and Interstitials in Transient-Enhanced Diffusion of Arsenic Implanted Into Silicon

Venables, D., Krishnamoorthy, V., Gossmann, H-J., Lilak, A., Jones, K. S., Jacobson, D. C.

MRS - Materials Research Society
2 Conference Proceedings Influence of Arsenic Clustering and Precipitation on the Interstitial and Vacancy Concentration in Silicon

Brindos, R., Clark, M.H., Jones, K.S., Griglione, M., Gossmann, Hans-J., Agarwal, A., Murto, B., Andideh, E.

Materials Research Society
8 Conference Proceedings Phosphorus / Silicon Interstitial Annealing After Ion Implantation

Keys, P. H., Brindos, R., Krishnamoorthy, V., Puga-Lambers, M., Jones, K. S., Law, Mark E.

Materials Research Society
3 Conference Proceedings Effect of Arsenic on Extended Defect Evolution in Silicon

Brindos, R., Jones, K.S., Law, M.E

Materials Research Society
9 Conference Proceedings Modeling of Dopant Defect Interactions

Camarce, C., Radic, L., Keys, P., Brindos, R, Jones, K.S., Law, M.E.

Materials Research Society
4 Conference Proceedings Effects of Arsenic Deactivation on Arsenic-Implant Induced Enhanced Diffusion in Silicon

Dokumaci, O., Law, M. E., Krishnamoorthy, V., Jones, K. S.

MRS - Materials Research Society
10 Conference Proceedings Trapping And Detrapping Of H In Si: Impact On Diffusion Properties And Solar Cell Processing

Sopori, Bhushan, Zhang, Y., Reedy, R., Jones, K., Ravindra, N.M., Rangan, S., Ashok, S.

Materials Research Society
5 Conference Proceedings The Effect Of Impurities On Diffusion And Activation Of Ion Implanted Boron In Silicon

Robertson, L.S., Brindos, R., Jones, K. S., Law, Mark E., Downey, D. F., Falk, S., Liu, J.

Materials Research Society
11 Conference Proceedings Effect of Extended Defects on the Enhanced Diffusion of Phosphorus Implanted Silicon

Keys, P. H., Li, J. H., Heitman, E., Packan, P. A., Law, M. E., Jones, K. S.

MRS - Materials Research Society
6 Conference Proceedings Effect of End-of-Range Defects, Arsenic Clustering, and Precipitation on Transient-Enhanced Diffusion in As+- Implanted Si

Krishnamoorthy, V., Venables, D., Moeller, K., Jones, K. S., Jackson, J.

MRS - Materials Research Society
12 Conference Proceedings EFFECT OF PRESSURE ON ARSENIC DIFFUSION IN GERMANIUM

Mitha, S., Theiss, S. D., Aziz, M. J., Schiferl, D., Poker, D. B.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12