Blank Cover Image

Atomistic Simulations of Damage Evolution in Silicon

Author(s):
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
568
Pub. Year:
1999
Page(from):
135
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994751 [1558994750]
Language:
English
Call no.:
M23500/568
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings 3-D Atomistic Simulations of Submicron Device Fabrication

Bunea, Marius M., Dunham, Scott T.

MRS - Materials Research Society
7 Conference Proceedings Modeling of a GaN Based Static Induction Transistor

Bunea, G. E., Dunham, S. T., Moustakas, T. D.

MRS - Materials Research Society
2 Conference Proceedings Ab-Initio Pseudopotential Calculations of Boron Diffusion in Silicon

Windl, W., Bunea, M. M., Stumpf, R., Dunham, S. T., Masquelier, M. P.

MRS - Materials Research Society
8 Conference Proceedings Modeling of Annealing of High Concentration Arsenic Profiles

Fastenko, Pavel, Dunham, Scott T., Henkelman, Graeme

Materials Research Society
3 Conference Proceedings ENERGETICS AND KINETICS OF EXTENDED (311) DEFFECTS IN Si

Fastenko, P., Dunham, S.T.

Electrochemical Society
9 Conference Proceedings Modeling Fermi Level Effects in Atomistic Simulations

Qin, Zudian, Dunham, Scott T.

Materials Research Society
4 Conference Proceedings Lattice Monte Carlo Simulations of Vacancy-Mediated Diffusion and Aggregation Using Ab Initio Parameters

Bunea, Marius M., Dunham, Scott T.

MRS - Materials Research Society
10 Conference Proceedings KINETICS OF DOPANT PRECIPITATION IN SILICON

Dunham, S.T.

Electrochemical Society
5 Conference Proceedings Atomistic Simulations of Effect of Coulombic Interactions on Carrier Fluctuations in Doped Silicon

Qin, Zudian, Dunham, Scott T.

Materials Research Society
11 Conference Proceedings MODELING OF PHOSPHORUS DIFFUSION IN SILICON

Dunham, S.T.

Electrochemical Society
6 Conference Proceedings Atomistic Simulations of Epitaxial Regrowth of As-doped Silicon

Joo Chul Yoon, Scott Dunham

Materials Research Society
12 Conference Proceedings DAMAGE TO CRYSTALLINE SILICON FOLLOWING IMPLANTATION BY LOW ENERGY SILICON IONS

Levin, Y., Herbots, N, Dunham, S.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12