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The Fracture Toughness of Polysilicon Microdevices

Author(s):
Publication title:
Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
518
Pub. Year:
1998
Page(from):
137
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994249 [1558994246]
Language:
English
Call no.:
M23500/518
Type:
Conference Proceedings

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