Heating Effects on the Young's Modules of Films Sputtered Onto Micromachined Resonators

Heating Effects on the Young's Modules of Films Sputtered Onto Micromachined Resonators

Author(s):

Publication title:

Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

518

Pub. Year:

1998

Page(from):

33

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994249 [1558994246]

Language:

English

Call no.:

M23500/518

Type:

Conference Proceedings

Details

TDL ID:	ZA00020785
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microelectromechanical structures for materials research
Conf. info. (Number):	1998
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1998.04.15-1998.04.16

Similar Items:

1 Conference Proceedings Titanium-Nickel Shape Memory Thin Film Actuators for Micromachined Valves Kahn, H., Benard, W. L., Huff, M. A., Heuer, A. H. MRS - Materials Research Society	7 Conference Proceedings On the Fracture toughness of Polysilicon MEMS Structures Kahn, H., Ballarini, R., Heuer, A.H. Materials Research Society
2 Conference Proceedings Polycrystalline Silicon Films for Microelectromechanical Devices Kahn, H., Stemmer, S., Mullen, R. L., Huff, M. A., Heuer, A. H. MRS - Materials Research Society	8 Conference Proceedings Passive devices for determining fracture strength of MEMS structural materials H. Kahn, R. Ballarini, A. H. Heuer Materials Research Society
3 Conference Proceedings Surface Oxide Effects on Static Fatigue of Polysilicon MEMS Kahn, H., Ballarini, R., Heuer, A.H. Materials Research Society	9 Conference Proceedings A surface-micromachined tunable film bulk acoustic resonator Pan, W., Soussan, P., Nauwelaers, B., Tilmans, H. A. C. SPIE - The International Society of Optical Engineering
4 Conference Proceedings Effects of Varying Mean Stress and Stress Amplitude on the Fatigue of Polysilicon Kahn, W, Ballarini, R., Heuer, A.H. Materials Research Society	10 Conference Proceedings Control of residual stresses in As-grown polysilicon by multi-layer deposition: The "Multipoly" process Yang, Jie, Kahn, H., He, A. Q., Phillips, S. M., Heuer, A. H. MRS-Materials Research Society
5 Conference Proceedings TiNi shape-memory alloy actuated micropump with fluid isolation Benard,W., Kahn,H., Huff,M.A. SPIE-The International Society for Optical Engineering	11 Conference Proceedings The Design of Multilayered Polysilicon for MOEMS Applications Sherman, D., Kahn, H., Phillips, S.M., Ballarini, R., Heuer, A.H. Materials Research Society
6 Conference Proceedings Water-level strength and fracture toughness testing of surface-micromachined MEMS devices Kahn, H., Tayebi, N., Ballarini, R., Mullen, R. L., Heuer, A. H. MRS-Materials Research Society	12 Conference Proceedings Low Temperature (300℃) Formation of Thermodynamically Stable NiSi2 Contacts to SiC Deeb, C., Kahn, H., Milhet, X., Zorman, C., Mehregany, M., Heuer, A.H. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12