Structural Characterization of Crystalline Si-C-N Films

Structural Characterization of Crystalline Si-C-N Films

Author(s):

Publication title:

Covalently bonded disordered thin-film materials : symposium held December 2-4, 1997, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

498

Pub. Year:

1998

Page(from):

301

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994034 [1558994033]

Language:

English

Call no.:

M23500/498

Type:

Conference Proceedings

Details

TDL ID:	ZA00020783
Series ID:	PA00000011
Conf. info. (Name):	Symposium on covalently bonded disordered thin-film materials
Conf. info. (Number):	1997
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1997.12.02-1997.12.04

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