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ICP Dry Etching of III-V Nitrides

Author(s):
Vartuli, C. B.
Lee, J. W.
MacKenzie, J. D.
Donovan, S. M.
Abernathy, C. R.
Pearton, S. J.
Shul, R. J.
Constantine, C.
Barratt, C.
Katz, A.
Poyakov, A. Y.
Shin, M.
Skowronski, M.
8 more
Publication title:
Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
468
Pub. date:
1997
Page(from):
393
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993723 [155899372X]
Language:
English
Call no.:
M23500/468
Type:
Conference Proceedings

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