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SPUTTERING INDUCED CHANGES IN DEFECT MORPHOLOGY AND DOPANT DIFFUSION FOR Si IMPLANTED GaAs: INFLUENCE OF ION ENERGY AND IMPLANT TEMPERATURE

Author(s):
Robinson, H. G.
Lee, C. C.
Haynes, T. E.
Allen, E. L.
Deal, M. D.
Jones, K. S.
1 more
Publication title:
Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
354
Pub. date:
1995
Page(from):
337
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992559 [1558992553]
Language:
English
Call no.:
M23500/354
Type:
Conference Proceedings

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