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DOPANT IMPLANTATION AND ACTIVATION IM POLYCRYSTALLINE-SiGe

Author(s):
Edwards, W. J.
Chieh, Yuen-Shung
Lin, Samuel
Ast, D. G.
Krusius, J. P.
Kamins, T. I.
1 more
Publication title:
Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
343
Pub. Year:
1994
Page(from):
685
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992436 [155899243X]
Language:
English
Call no.:
M23500/343
Type:
Conference Proceedings

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