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LOW TEMPERATURE ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION OF GROUP 14 OXIDE FILMS

Author(s):
Hoffman, David M.
Atagi, Lauren M.
Chu, Wei-Kan
Liu, Jia-Rui
Zheng, Zongshuang
Rubiano, Rodrigo R.
Springer, Robert W.
Smith, David C.
3 more
Publication title:
Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
343
Pub. Year:
1994
Page(from):
523
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992436 [155899243X]
Language:
English
Call no.:
M23500/343
Type:
Conference Proceedings

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