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PREPARATION OF PZT THIN FILMS BY ECR PECVD

Author(s):
Kim, J. W.
Kim, S. T.
Chung, S. W.
Shin, J. S.
No, K. S.
Wee, D. M.
Lee, W. J.
2 more
Publication title:
Polycrystalline thin films : structure, texture, properties, and applications : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
343
Pub. date:
1994
Page(from):
493
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992436 [155899243X]
Language:
English
Call no.:
M23500/343
Type:
Conference Proceedings

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