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Applications of neural networks in IC lithography

Author(s):
Publication title:
Applications and science of artificial neural networks II : 9-12 April, 1996, Orlando, Florida
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2760
Pub. Year:
1996
Page(from):
702
Page(to):
712
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421418 [0819421413]
Language:
English
Call no.:
P63600/2760
Type:
Conference Proceedings

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