Blank Cover Image

Resist and etched line profile characterization using scatterometry

Author(s):
Publication title:
Metrology, Inspection, and Process Control for Microlithography XI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3050
Pub. date:
1997
Page(from):
476
Page(to):
486
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424648 [0819424641]
Language:
English
Call no.:
P63600/3050
Type:
Conference Proceedings

Similar Items:

Raymond,C.J., Naqvi,S.S.H., McNeil,J.R.

SPIE-The International Society for Optical Engineering

S.M.G. Wilson, H.M. Marchman, S.S.H. Naqvi, J.R. McNeil

Society of Photo-optical Instrumentation Engineers

M.R. Murnane, C.J. Raymond, S.S.H. Naqvi, J.R. McNeil

Society of Photo-optical Instrumentation Engineers

8 Conference Proceedings Scatterometric sensor for lithography

C.J. Raymond, M.R. Murnane, S.S.H. Naqvi, J.R. McNeil

Society of Photo-optical Instrumentation Engineers

Raymond,C.J., Murnane,M.R., Prins,S.L., Naqvi,S.S.H., McNeil,J.R., Hosch,J.W.

SPIE-The International Society for Optical Engineering

Minhas,B.K., Prins,S.L., Naqvi,S.S.H., McNeil,J.R.

SPIE-The International Society for Optical Engineering

M.R. Murnane, C.J. Raymond, S.L. Prins, S.S.H. Naqvi, J.R. McNeil

Society of Photo-optical Instrumentation Engineers

Coulombe,S.A., Logofatu,P.C., Minhas,B.K., Naqvi,S.S.H., McNeil,J.R.

SPIE-The International Society for Optical Engineering

Raymond,C.J., Murnane,M.R., Prins,S.L., Sohail,S., Naqvi,S.H., McNeil,J.R.

SPIE-The International Society for Optical Engineering

McNeil, J.R., Coulombe, S.A., Logofatu, P.C., Raymond, Christopher J., Naqvi, Sohail H., Collins, G.J.

SPIE

S.M.G. Wilson, S.S.H. Naqvi, J.R. McNeil, H.M. Marchman, B.D. Johs

Society of Photo-optical Instrumentation Engineers

Zaidi,S.H., McNeil,J.R., Naqvi,S.S.H.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12