Ti(C,N)film formed by ion-beam-assisted deposition

Ti(C,N)film formed by ion-beam-assisted deposition

Author(s):

Liu,H. ( Southwest Jiao Tong Univ. )
Chen,Y.
Cai,H.

Publication title:

Smart structures and materials 1997 : Smart materials technologies : 3-4 March 1997, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3040

Pub. Year:

1997

Page(from):

291

Page(to):

293

Pub. info.:

Bellingham: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424532 [0819424536]

Language:

English

Call no.:

P63600/3040

Type:

Conference Proceedings

Details

TDL ID:	ZA00020765
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures and Materials
Conf. info. (Number):	1997
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1997.03.03-1997.03.04

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