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Measurement of geometrical aberration by holographic gratings

Author(s):
Publication title:
Automated optical inspection for industry : 6-7 November 1996, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2899
Pub. Year:
1996
Page(from):
41
Page(to):
46
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819423009 [0819423009]
Language:
English
Call no.:
P63600/2899
Type:
Conference Proceedings

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