Blank Cover Image

Collective fabrication of gallium-arsenide-based microsystems

Author(s):
Publication title:
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2879
Pub. Year:
1996
Page(from):
315
Page(to):
326
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422774 [0819422770]
Language:
English
Call no.:
P63600/2879
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Design and fabrication of optical microcavities using ？-？ semiconductor-based MOEMS

Viktorovitch,P., Leclercq,J.L., Goutain,E., Rondi,D.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings CAD framework concept for the design of integrated microsystems

Poppe,A., Rencz,M., Szekely,V., Karam,J.-M., Courtois,B., Hofmann,K., Glesner,M.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings III-V-semiconductor-based MOEMS devices for optical telecommunications (Invited Paper)

Garrigues, M., Leclercq, J.L., Viktorovitch, P.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings InP-membrane photonic devices (Invited Paper)

Viktorovitch, P., Garrigues, M., Leclercq, J.L., Letartre, X., Rojo-Romeo, P., Seassa, C.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Microsystem design framework based on tool adaptations and library developments

Karam,J.-M., Courtois,B., Rencz,M., Poppe,A., Szekely,V.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings III-V Semiconductor Micro-Machined Devices for Optical Sensing Applications in the SWIR-MWIR Spectral Range - Technological Review

Pautet, C., Cortial, S., Hugon, X, Garrigues, M, Leclercq, J.L., Viktorovitch, P.

ESA Publications Division
4 Conference Proceedings Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters

Spisser,A., Regreny,P., Seassal,C., Leclercq,J.-L., Viktorovitch,P.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Optical and mechanical design of an InP-based tunable detector for gas-sensing applications

Bondavalli,P., Benyattou,T., Garrigues,M., Leclercq,J.L., Regreny,P., Sun,K., Viktorovitch,P., Cortial,S., Hugon,X., …

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Engineering tool set for monolithic and hybrid microsystem design

Boutamine,H., Karam,J.M., Courtois,B., Drake,P., Oudinot,J., El Tahawi,H., Cao,A., Rencz,M., Poppe,A., Szekely,V.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Phase-matching pseudo-resonant tunable InP-based MOEMS

Zhou, D., Sun, K., Garrigues, M., Leclercq, J.-L., Regreny, P., Peng, J., Viktorovitch, P.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Highly tunable and selective Fabry Perot filter based on InP-air Bragg mirrors for WDM applications

Dantec,R.Le, Benyattou,T., Guillot,G., Spisser,A., Leclercq,J.L., Viktorovitch,P., Rondi,D.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Grating enhanced MOEMS: a novel class of beam steering devices

Pradelles, J., Garrigues, M., Leclercq, J. L., Viktorovitch, P.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12