Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures

Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical structures

Author(s):

Publication title:

Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2879

Pub. Year:

1996

Page(from):

225

Page(to):

235

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422774 [0819422770]

Language:

English

Call no.:

P63600/2879

Type:

Conference Proceedings

Details

TDL ID:	ZA00020749
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
Conf. info. (Number):	1996 : 2nd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1996.10.14-1996.10.15

Similar Items:

1 Conference Proceedings Supercritical carbon dioxide extraction of solvent from micromachined structures Russick, Edward M., Adlins, Carol L.J., Dyck, Christopher W. American Chemical Society	7 Conference Proceedings Optical probe for micromachine performance analysis Dickey,F.M., Holswade,S.C., Smith,N.F., Miller,S.L. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Oil, Grease, and Solvent R〓noal from Waste Using Supercritical Carbon Dioxide Smith, H. Mike, Olson, Ron B., Adkins, Carol L. J., Russick, Edward M. American Institute of Chemical Engineers	8 Conference Proceedings Release-etch modeling for complex surface-micromachined structures Eaton,W.P., Smith,J.H., Jarecki,R.L. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper) Smith,J.H., Rodgers,M.S., Sniegowski,S.L., Miller,S.L., Hetherington,D.L., McWhorter,P.J., Warren,M.E. SPIE-The International Society for Optical Engineering	9 Conference Proceedings CAFFEINE EXTRACTION RATES FROM COFFEE BEANS WITH SUPERCRITICAL CARBON DIOXIDE Peker, Hulya., Srinivasan, M. P., Smith, J. M., McCoy, Ben. J. American Institute of Chemical Engineers
4 Conference Proceedings Creating Nanoporosity by Selective Extraction of Porogens Using Supercritical Carbon Dioxide/Cosolvent Processes Lahlouh, B., Rajagopalan, T., Lubguban, J. A., Biswas, N., Gangopadhyay, S., Sun, J., Huang, D., Simon, S. L., Kim, H. … Materials Research Society	10 Conference Proceedings Micromechanical structures and microelectronics for acceleration sensing Davies,B.R., Montague,S., Smith,J.H., Lemkin,M. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Supercritical carbon dioxide extraction of volatile compounds from rosemary Coelho, J.A.P., Mendes, R.L., Provost, M.C., Cabral, J.M.S., Novais, J.M., Palavra, A.M.F. American Chemical Society	11 Conference Proceedings Supercritical Carbon Dioxide Extraction of Terpenes from Orange Essential Oil Temelli, F., Braddock, R. J., Chen, C. S., Nagy, S. American Chemical Society
6 Conference Proceedings EXTRACTION OF ORGANIC CONTAMINANTS FROM SOIL WITH SUPERCRITICAL CARBON DIOXIDE GADALLA , H., ERKEY, C., HESS, R., GHOREISHI, S., AKGERMAN, A. American Institute of Chemical Engineers	12 Conference Proceedings Multi-Via Electromigration Test Structures for Identification and Characterization of Different Failure Mechanisms Choi, Z.-S., Chang, C.W., Lee, J.H., Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12