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Bipolar compatible epitaxial poly for surface-micromachined smart sensors

Author(s):
Gennissen,P.T. ( Delft Univ.of Technology )
French,P.J.
Bartek,M.
Sarro,P.M.
Boogaard,A.van der
Visser,C.
1 more
Publication title:
Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2879
Pub. Year:
1996
Page(from):
135
Page(to):
142
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422774 [0819422770]
Language:
English
Call no.:
P63600/2879
Type:
Conference Proceedings

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