TD formation in CZ-silicon annealed at 450。?in air ambient
- Author(s):
- Singh,S. ( Univ.of Agriculture and Technology )
- Prakash,O.
- Pant,G.B.
- Publication title:
- Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2638
- Pub. Year:
- 1995
- Page(from):
- 129
- Page(to):
- 136
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420046 [0819420042]
- Language:
- English
- Call no.:
- P63600/2638
- Type:
- Conference Proceedings
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