Multiparameter process metrology using scatterometry
- Author(s):
Raymond,C.J. ( Univ.of New Mexico ) Murnane,M.R. Prins,S.L. Sohail,S. Naqvi,S.H. McNeil,J.R. - Publication title:
- Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2638
- Pub. Year:
- 1995
- Page(from):
- 84
- Page(to):
- 93
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420046 [0819420042]
- Language:
- English
- Call no.:
- P63600/2638
- Type:
- Conference Proceedings
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