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Multiparameter process metrology using scatterometry

Author(s):
Raymond,C.J. ( Univ.of New Mexico )
Murnane,M.R.
Prins,S.L.
Sohail,S.
Naqvi,S.H.
McNeil,J.R.
1 more
Publication title:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2638
Pub. Year:
1995
Page(from):
84
Page(to):
93
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420046 [0819420042]
Language:
English
Call no.:
P63600/2638
Type:
Conference Proceedings

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