Optical studies of fluorocarbon film formation by a high-density plasma etcher

Optical studies of fluorocarbon film formation by a high-density plasma etcher

Author(s):

Publication title:

Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2638

Pub. Year:

1995

Page(from):

46

Page(to):

57

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420046 [0819420042]

Language:

English

Call no.:

P63600/2638

Type:

Conference Proceedings

Details

TDL ID:	ZA00020725
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Microelectronic Manufacturing : Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing
Conf. info. (Number):	1995 : 2nd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1995.10.25-1995.10.26

Similar Items:

1 Conference Proceedings Characterization Of ECR Oxide Films For ILD Applications Fowler, B.W., Carpio, R.A. Electrochemical Society	7 Conference Proceedings THE FORMATION AND REMOVAL OF RESIDUE FORMED DURING TiN FLUOROCARBON PLASMA ETCHING Kim, Y.B., Conard, T., Vanhaeren, D., Baklanov, M., Vanhaelemeersch, S., Vandervorst, W., Maex, K. Electrochemical Society
2 Conference Proceedings Advances in infrared spectroscopic methods for epitaxial film characterization Carpio,R.A., Fowler,B.W., Theiss,W. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Probing high-density plasmas with soft x-ray lasers (Invited Paper) Celliers,P.M., Barbee,T.W.,Jr., Cauble,R.C., Da Silva,L.B., Decker,C.D., Kalantar,D.H., Key,M.H., London,R.A., … SPIE-The International Society for Optical Engineering
3 Conference Proceedings Etch Induced Damage in High Density Inductively Coupled Plasma Etching Reactor Zhong, W., Misra, D., Bartynski, R.A., Patel, V., Singh, B. Electrochemical Society	9 Conference Proceedings Mechanism for thermal interference and crowding in a high-density magneto-optical recording and a method of compensation Wang,W.W., Kwor,R.Y., Yang,B.W. SPIE-The International Society for Optical Engineering
4 Conference Proceedings The Measurement of Submicron Epitaxial Layer Thickness and Free Carrier Concentration by Infrared Reflectance Spectroscopy Fowler, B.W., Simmons, D.G., Carpio, R.A., Liu, S., Solomon, P.R., Nishikida, K. Electrochemical Society	10 Conference Proceedings Fluorocarbon Films From Plasma Polymerization of Hexafluoropropylene and Hydrogen Mountsier, T. W., Kumar, D. MRS - Materials Research Society
5 Conference Proceedings THE REACTION OF VAPOR HF WITH CHEMICALLY FORMED SILICON OXIDE: PRODUCTION OF STABLE HYDROGEN- TERMINATED SURFACES Barnett, J.M., Grothe, P.A., Martin, J.S., Carpio, R.A., Fowler, B.W., Atluri, Vasu, Herbots, Nicole Electrochemical Society	11 Conference Proceedings Plasma Etch Induced Damage Studies using a High Density Inductively Coupled RE Etcher Patrick, R., Schoenborn, Ph. Electrochemical Society
6 Conference Proceedings Advanced optical characterization techniques for borophosphosilicate films Carpio,R.A., Taylor,J. SPIE-The International Society for Optical Engineering	12 Conference Proceedings A Comparison of Infrared Reflectance Spectroscopy and Spectroscopic Ellipsometry for Polysilicon Film Process Control Carpio, R., Fowler, B., Simmons, D.G., Liu, S., Solomon, P.R. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12