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Evaluation of contaminant-induced charge from oxide chemical-mechanical polish

Author(s):
Publication title:
Optical Characterization Techniques for High-P6rfo「nwic6 Microelectronic Device Manufacturing II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2638
Pub. date:
1995
Page(from):
27
Page(to):
37
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420046 [0819420042]
Language:
English
Call no.:
P63600/2638
Type:
Conference Proceedings

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