Formation of Tungsten Ohmic Coutact on n-Type 6H-SiC by Pulsed Laser Processes

Formation of Tungsten Ohmic Coutact on n-Type 6H-SiC by Pulsed Laser Processes

Author(s):

Publication title:

Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997

Title of ser.:

Materials science forum

Ser. no.:

264-268

Pub. Year:

1998

Vol.:

Part2

Page(from):

779

Page(to):

782

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878497928 [0878497927]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00020694
Series ID:	PA00000012
Conf. info. (Name):	ICSCIII-N : International Conference on Silicon Carbide, III-Nitrides Related Materials
Conf. info. (Number):	1997 : 7th
Conf. info. (Venue):	Stockholm, Sweden
Conf. info. (Date):	1997.09.00

Similar Items:

1 Conference Proceedings Improved Ohmic Contacts to 6H-SiC by Pulsed Laser Processing Nakashima, K., Eryu, O., Ukai, S., Yoshida, K., Watanabe, M. Trans Tech Publications	7 Conference Proceedings A New Type of SiC Gas Sensor with a pn-Junction Structure Nakashima, K., Okuyama, Y., Ando, S., Eryu, O., Abe, K., Yokoi, H., Oshima, T. Trans Tech Publications
2 Conference Proceedings Impurity Activation in N+ Ion-Implanted 6H-SiC with Pulsed Laser Annealing Method Eryu, O., Aoyama, K., Abe, K., Nakashima, K. Materials Research Society	8 Conference Proceedings A New Type of SiC Gas Sensor with a pn-Junction Structure Nakashima, K., Okuyama, Y., Ando, S., Eryu, O., Abe, K., Yokoi, H., Oshima, T. Trans Tech Publications
3 Conference Proceedings Annealing of a Vacancy-Type Defect and Diffusion of Implanted Boron in 6H-SiC Ohshima, T., Uedono, A., Eryu, O., Lee, K.K., Abe, K., Itoh, H., Nakashima, K. Trans Tech Publications	9 Conference Proceedings Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11-20), (1-100), and (0001) Oriented 6H-SiC Eryu, O., Matsuo, D., Abe, K., Nakashima, K. Trans Tech Publications
4 Conference Proceedings Effects of Surface Treatments of 6H-SiC upon Metal-SiC Interfaces Abe, K., Sumitomo, M., Sumi, T., Eryu, O., Nakashima, K. Trans Tech Publications	10 Conference Proceedings Direct Observation of the Solid-Phase Recrystallization of Self-Implanted Amorphous SiC Layer on (11-20), (1-100), and (0001) Oriented 6H-SiC Eryu, O., Matsuo, D., Abe, K., Nakashima, K. Trans Tech Publications
5 Conference Proceedings Effects of Surface Treatments of 6H-SiC upon Metal-SiC Interfaces Abe, K., Sumitomo, M., Sumi, T., Eryu, O., Nakashima, K. Trans Tech Publications	11 Conference Proceedings Ohmic Contact Formation on n-Type 6H-SiC using NiSi2 Nakamura, T., Shimada, H., Satoh, M. Trans Tech Publications
6 Conference Proceedings Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide Hishida, Y., Watanabe, M., Nakashima, K., Eryu, O. Trans Tech Publications	12 Conference Proceedings Optical Centers Related to Laser-Doped Erbium in Silicon Nakashima, K., Eryu, O., Iioka, O., Minami, H., Watanabe, M. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12