Multiwavelength ATR reflectometry of thin films
- Author(s):
- Hoffmann, A. ( Research Institute of Solid State Physics, Hungary )
- Kroo, N.
- Lenkefi, Z.
- Szentirmay, Z.
- Publication title:
- International Conference on Applied Optical Metrology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3407
- Pub. Year:
- 1998
- Page(from):
- 256
- Page(to):
- 261
- Pub. info.:
- Bellingham, Wash.: SPIE--International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428592 [0819428590]
- Language:
- English
- Call no.:
- P63600/3407
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Magnetic Domains in Microstructured Thin Films with Perpendicular Anisotropy
Trans Tech Publications |
Materials Research Society |
2
Conference Proceedings
Novel DUV photoresist modeling by optical thin film decomposition from spectral ellipsometry/reflectometry data
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Laser reflectometry for in-situ monitoring of the epitaxial growth of thin films
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
New method for determining the optical properties of thin films by reflectometry
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
11
Conference Proceedings
Ultra-thin-film characterization with vacuum ultraviolet spectroscopic reflectometry (VUV-SR)
Society of Photo-optical Instrumentation Engineers |
6
Conference Proceedings
Characterization of thin films nonuniform in optical parameters by spectroscopic digital reflectometry
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Characterization of thin films and stack in MOEMS structure with ellipsometry and reflectometry techniques
SPIE - The International Society of Optical Engineering |