Roughness parameters and surface deformation measured by "Coherence Radar"
- Author(s):
- Ettl, P. ( University of Erlangen, Germany )
- Schmidt, B.
- Schenk, M.
- Laszlo, I.
- Hausler, G.
- Publication title:
- International Conference on Applied Optical Metrology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3407
- Pub. Year:
- 1998
- Page(from):
- 133
- Page(to):
- 140
- Pub. info.:
- Bellingham, Wash.: SPIE--International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428592 [0819428590]
- Language:
- English
- Call no.:
- P63600/3407
- Type:
- Conference Proceedings
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