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Near-field optical metrology

Author(s):
Spajer, Michel ( Universite de Franche-Comte, France )  
Publication title:
International Conference on Applied Optical Metrology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3407
Pub. Year:
1998
Page(from):
40
Page(to):
46
Pub. info.:
Bellingham, Wash.: SPIE--International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428592 [0819428590]
Language:
English
Call no.:
P63600/3407
Type:
Conference Proceedings

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