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FTIR reflectance characterization of SIMOX buried oxide layers

Author(s):
Publication title:
Optical diagnostic methods for inorganic transmissive materials : 20-21 July 1998, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3425
Pub. Year:
1998
Page(from):
2
Page(to):
9
Pub. info.:
Bellingham, Wash., USA: SPIE
ISSN:
0277786X
ISBN:
9780819428806 [0819428809]
Language:
English
Call no.:
P63600/3425
Type:
Conference Proceedings

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