Polyimide optical waveguide with multi-fan-out for multichip module system
- Author(s):
- Matsumoto,T. ( Tohoku Univ.(Japan) )
- Kuwana,Y. ( Hitachi Chemical Co.,Ltd. (Japan) )
- Hirose,A. ( Tohoku Univ.(Japan) )
- Kurino,H. ( Tohoku Univ.(Japan) )
- Koyanagi,M. ( Tohoku Univ.(Japan) )
- Publication title:
- Optoelectronic Interconnects V
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3288
- Pub. Year:
- 1998
- Page(from):
- 133
- Page(to):
- 144
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427274 [0819427276]
- Language:
- English
- Call no.:
- P63600/3288
- Type:
- Conference Proceedings
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