CMOS chemical microsensors based on resonant cantilever beams
- Author(s):
- Publication title:
- Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3328
- Pub. Year:
- 1998
- Page(from):
- 233
- Page(to):
- 243
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427724 [0819427721]
- Language:
- English
- Call no.:
- P63600/3328
- Type:
- Conference Proceedings
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