Low-temperature quartz-to-silicon bonding for SAW applications
- Author(s):
- Berthold,A. ( Delft Univ.of Technology (Netherlands) )
- Sarro,P.M. ( Delft Univ.of Technology (Netherlands) )
- Vallekoop,M.J. ( Delft Univ.of Technology (Netherlands) )
- Publication title:
- Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3328
- Pub. Year:
- 1998
- Page(from):
- 81
- Page(to):
- 85
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427724 [0819427721]
- Language:
- English
- Call no.:
- P63600/3328
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Silicon thermo-optic micromodulators for low-cost low-performance fiber-in-the-loop applications
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Influence of Deposition Parameters and Temperature on Stress and Strain of In Situ Doped PECVD Silicon Carbide
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Influence of Deposition Parameters and Temperature on Stress and Strain of In Situ Doped PECVD Silicon Carbide
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Plasma-Assisted Atomic Layer Deposition of TiN Films at Low Process Temperature for High-Aspect Ratio Applications
Materials Research Society |
Electrochemical Society |
6
Conference Proceedings
Low-loss small-cross-section silicon-on-silicon rib waveguides with high-confining ion-implanted lower cladding
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
EXTREME SUPERSATURATION OF OXYGEN IN LOW TEMPERATURE EPITAXIAL SILICON AND SILICON-GERMANIUM ALLOYS
Materials Research Society |