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Development of a low-cost x-ray mask for high-aspect-ratio MEM smart structures (Invited Paper)

Author(s):
Publication title:
Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3328
Pub. Year:
1998
Page(from):
14
Page(to):
22
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427724 [0819427721]
Language:
English
Call no.:
P63600/3328
Type:
Conference Proceedings

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