CMOS MEMS technology and CAD:the case of thermal microtransducers
- Author(s):
- Publication title:
- Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3328
- Pub. Year:
- 1998
- Page(from):
- 2
- Page(to):
- 13
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427724 [0819427721]
- Language:
- English
- Call no.:
- P63600/3328
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
Extraction of the Coefficient of Thermal Expansion of Thin Films From Buckled Membranes
Materials Research Society |
3
Conference Proceedings
Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness-adjusted polymer coating
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Defect Related Problems with the On-Chip Integration of Sensors into CMOS Devices
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Low Temperature Packaging of CMOS Infrared Microsystems by Si-Al-Au Bonding
Electrochemical Society |