Laser-induced structural or compositional modifications of Si or IV-IV surface: planarization,pulsed-laser-induced epitaxy,carbon incorporation,and chemical etching

Laser-induced structural or compositional modifications of Si or IV-IV surface: planarization,pulsed-laser-induced epitaxy,carbon incorporation,and chemical etching

Author(s):

Boulmer,J. ( Univ.de Paris-Sud (France) )

Dragnea,B. ( Univ.de Paris-Sud (France) )

Guedj,C. ( Univ.de Paris-Sud (France) )

Debarre,D. ( Univ.de Paris-Sud (France) )

Bosseboeuf,A. ( Univ.de Paris-Sud (France) )

Finkman,E. ( Technion-Israel Institute of Technology )

Bourguignon,B. ( Univ.de Paris-Sud (France) )

2 more

Publication title:

ALT '97, International Conference on Laser Surface Processing : 8-12 September 1997, Limoges, France

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3404

Pub. Year:

1998

Page(from):

149

Page(to):

158

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819428554 [0819428558]

Language:

English

Call no.:

P63600/3404

Type:

Conference Proceedings

Details

TDL ID:	ZA00020635
Series ID:	PA00000029
Conf. info. (Name):	International Conference on Laser Surface Processing - ALT
Conf. info. (Number):	1997
Conf. info. (Venue):	Limoges, France
Conf. info. (Date):	1997.09.08-1997.09.12

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