Influence of topographical variations on reliable via and contact formation
- Author(s):
- Healey,J.T. ( Motorola )
- Rubel,S.E. ( Motorola )
- Publication title:
- Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3507
- Pub. Year:
- 1998
- Page(from):
- 131
- Page(to):
- 145
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429667 [081942966X]
- Language:
- English
- Call no.:
- P63600/3507
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Resolving localized oxide breakthrough during poly etch of nonvolatile floating gate structures
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Characterization of Contact Formation Process for High Efficiency Solar Cell Using Design of Experiment (DOE)
Trans Tech Publications |
Society of Photo-optical Instrumentation Engineers |
Kluwer Academic Publishers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
New ultrasound pulse-echo method for-measuring the thickness of thin membranes
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Formation of fast magnetosonic shock waves during two current loops collision in solar flare
ESA Publications Division |
12
Conference Proceedings
Empirical Assessment and Modeling of Topographic Induced Variations in the Radar Backscattering from Different Vegetation Formations in Mediterranean …
ESA Publications Division |