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Evaluation of optical supersmooth surface using AFM and comparison to interference method

Author(s):
  • Li,J. ( Jiangxi Academy of Sciences (China) )
  • Li,D. ( Tsinghua Univ.(China) )
  • Zhang,X. ( Jiangxi Academy of Sciences (China) )
  • Li,X. ( Jiangxi Academy of Sciences (China) )
  • Zhao,A. ( Jiangxi Academy of Sciences (China) )
Publication title:
Current developments in optical elements and manufacturing : 16-18 September 1998, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3557
Pub. Year:
1998
Page(from):
336
Page(to):
344
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430182 [0819430188]
Language:
English
Call no.:
P63600/3557
Type:
Conference Proceedings

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