Common-path interference profiler with nondestructive testing of a supersmooth surface

Common-path interference profiler with nondestructive testing of a supersmooth surface

Author(s):

Yang,Y. ( Zhejiang Univ.(China) )
Zhuo,Y. ( Zhejiang Univ.(China) )
Cheng,H. ( Zhejiang Univ.(China) )

Publication title:

Current developments in optical elements and manufacturing : 16-18 September 1998, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3557

Pub. Year:

1998

Page(from):

326

Page(to):

330

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430182 [0819430188]

Language:

English

Call no.:

P63600/3557

Type:

Conference Proceedings

Details

TDL ID:	ZA00020630
Series ID:	PA00000029
Conf. info. (Name):	Photonics China : Current Developments in Optical Elements and Manufacturing
Conf. info. (Number):	1998
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	1998.09.16-1998.09.18

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