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Analysis of errors and calibration method for manufacturing multilevel diffractive optical element by ion etching

Author(s):
  • Fu,Y. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Lu,Z. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Ma,Y. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Weng,Z. ( Changchun Institute of Optics and Fine Mechanics (China) )
Publication title:
Current developments in optical elements and manufacturing : 16-18 September 1998, Beijing, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3557
Pub. Year:
1998
Page(from):
181
Page(to):
184
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430182 [0819430188]
Language:
English
Call no.:
P63600/3557
Type:
Conference Proceedings

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