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Confirmation of the Wavelength Dependence of Silicon Oxidation Induced By Visible Radiation

Author(s):
Publication title:
Emerging technologies for in situ processing
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
139
Pub. Year:
1988
Page(from):
171
Page(to):
178
Pages:
8
Pub. info.:
Dordrecht: Martinus Nijihoff Publishers
ISSN:
0168132X
ISBN:
9789024737338 [9024737338]
Language:
English
Call no.:
N11482/139
Type:
Conference Proceedings

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