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Power Deposition in Low Pressure Capacitively Coupled RF Discharges

Author(s):
Publication title:
Microwave discharges : fundamentals and applications
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
302
Pub. Year:
1993
Page(from):
359
Page(to):
378
Pages:
20
Pub. info.:
New York: Plenum Press
ISBN:
9780306443558 [0306443554]
Language:
English
Call no.:
N11479/302
Type:
Conference Proceedings

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