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ECR Plasma Sources

Author(s):
Wilhelm R.  
Publication title:
Microwave discharges : fundamentals and applications
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
302
Pub. Year:
1993
Page(from):
161
Page(to):
179
Pages:
19
Pub. info.:
New York: Plenum Press
ISBN:
9780306443558 [0306443554]
Language:
English
Call no.:
N11479/302
Type:
Conference Proceedings

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